A large-aperture optical profiler is a high-precision optical measurement instrument specifically designed for measuring parameters such as surface topography, form error, and roughness of large-sized, high-precision optical components.

1. Manufacturing and Inspection of Lithography Machine Optical Systems
This is the most core and critical application area for large-aperture optical profilers. Lithography machines, particularly EUV lithography machines, can be regarded as the most precise "cameras" ever manufactured by humankind. Their internal optical systems are the core determinant of imaging quality.

2. Specific Applications in Wafer Fabrication Processes

Within the direct processes of wafer manufacturing, optical profilers also play a critical role, particularly in the fields of advanced packaging and materials characterization.

3. Critical Components of Semiconductor Equipment

Beyond lithography machines, other semiconductor manufacturing tools also incorporate optical and precision mechanical components that require high-precision measurement.