The application of hexapods in the field of high-end manufacturing and metrology represents the ultimate demonstration of their core value. In this sector, where precision requirements are extremely stringent, hexapods serve as key equipment for achieving nanoscale positioning and complex motion.

1. Ultra-Precision Machining and Manufacturing
In machining at the micrometer or even nanometer scale, the positioning accuracy of the workpiece directly determines the quality of the final product.

Micro/Nano Machining and Femtosecond Machining: In equipment such as laser processing systems and lithography machines, hexapods are responsible for precisely positioning workpieces (e.g., silicon wafers, optical components), ensuring the machining focus is perfectly accurate. This is used for manufacturing Micro-Electro-Mechanical Systems (MEMS), diffractive optical elements (DOEs), and more.

Precision Assembly: In processes like fiber optic alignment and precision sensor assembly, hexapods achieve alignment and bonding of multiple components at the sub-micron level through fine six-degrees-of-freedom adjustments.

2. Precision Metrology and Inspection
This is one of the most extensive application areas for hexapods, used for moving sensors or workpieces to perform three-dimensional measurements.

Coordinate Measuring Machines (CMMs): Acting as a movable precision platform, hexapods carry probes or vision sensors to perform high-accuracy 3D scanning and dimensional verification of complexly shaped workpieces (e.g., turbine blades, precision molds).

Surface Topography and Contour Measurement: In surface measurement instruments like white light interferometers and confocal microscopes, hexapods precisely move the sample or objective lens, enabling automated, large-area, high-resolution 3D topography reconstruction for analyzing surface roughness, flatness, etc.

Roundness/Cylindricity Measurement: Through precise tilting and positioning motions, and in coordination with sensors, hexapods measure geometric tolerances such as the roundness and cylindricity of workpieces.

3. Optical System Alignment and Testing
The performance of optical systems is highly dependent on the precise alignment of the light path.

Lens/Sensor Calibration: In the production of camera modules and lithography scanner objectives, hexapods are used to finely adjust the relative position of lens groups or sensor chips to eliminate aberrations and achieve optimal image quality.

Free-Space Optical Path Setup and Alignment: In advanced research areas like laser communication and quantum experiments, hexapods are used to accurately adjust the position and angle of optical components (e.g., mirrors, beam splitters), achieving and maintaining precise alignment of complex optical paths.

Testing of Non-Visible Optical Systems (e.g., IR, UV): Since direct visual observation is impossible, hexapods are essential for performing precise, automated alignment to test the performance of these specialized optical systems.

4. Semiconductor Manufacturing and Inspection (Core to High-End Manufacturing)
This represents one of the most demanding application fields for hexapods, requiring extreme precision and stability.

Lithography Machines: Hexapods support and finely adjust the wafer stage, enabling nanometer-level alignment and focusing. They are one of the core components in modern lithography systems.

Wafer Inspection and Metrology: In equipment such as scanning electron microscopes (SEM) and defect inspection tools, hexapods are responsible for accurately moving the wafer, automatically bringing areas of interest into the device's field of view for scanning.